2004 | 12 Established Sorona Inc. |
2005 | 02 Cluster sputtering system supplying for metal and oxide film |
| 03 Dry etching system supplying for metal film |
| 03 Patent resistration "0477546" |
| 04 HDP-CVD system supply |
| 06 Patent resistration "0495872" |
| 07 Approved R&D center by KOTIA |
| 08 Approved ISO9001:2000 |
| 08 Approved Venture company by KIBO |
| 11 Approved CE Marking for sputtering system |
2006 | 04 Joined in "Medium and small sized enterprise technical innovation & development business" which Ministry of Science & Technology Executes |
| 06 Development of SAM coating system for imprinting & bio-technology |
| 09 Patent resistration "10-0628557" |
2009 | 06 Patent resistration "10-0904719" |
2010 | 09 SAM coating system exports to the Singapore |
| 11 Patent resistration "10-0994920" |
2011 | 06 Development of ICP etching system of sapphire etching for LED |
2012 | 02 Patent resistration "10-1124167" |
| 08 Patent resistration "10-1176616" |
| 10 Sputtering system exports to the China |
| 12 Patent Registration "10-120989" |
2013 | 02 Patent Registration "10-1235906" |
| 03 Development of SiGe epitaxial growing system by sputtering |
| 04 Epi growing system exports to the US |
2014 | 04 Development of Microwave ashing system |
2015 | 01 Development of AlN Reactive sputtering system |
| 07 Development of Large area LED Etching system"SIE-1204" and supply |
| 11 Patent Registration "10-1574785" |
2017 | 09 LED Etching system"SIE-1204" supply |
2018 | 02 High step coverage "HSC" sputter system supply |
| 03 IN-LINE sputter system supply |
2019 | 07 Moved to the anew founded factory |